Vertical Plasma Etching Cleaning Machine
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Model:PE16-2544

Main Unit Dimensions: Length 1860mm / Width 1470mm / Height 2100mm

Weight: 2550 KG

Number of Electrodes: 16 Pieces

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Model:PE19-2544

Main Unit Dimensions: Length 1980mm / Width 1470mm / Height 2100mm

Weight: 2700 KG

Number of Electrodes: 19 Pieces

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Model:PE21-2544

Main Unit Dimensions: Length 2010mm / Width 1470mm / Height 2100mm

Weight: 2800 KG

Number of Electrodes: 21 Pieces

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Model:PE25A-2544

Main Unit Dimensions: Length 2275mm / Width 1670mm / Height 2770mm

Weight: 3000 KG

Number of Electrodes: 25 Pieces

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Model:PE16-3052

Main Unit Dimensions: Length 1895mm / Width 1668mm / Height 2140mm

Weight: 2850 KG

Number of Electrodes: 16 Pieces

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Model:PE19-3052

Main Unit Dimensions: Length 2100mm / Width 1730mm / Height 2200mm

Weight: 3050 KG

Number of Electrodes: 19 Pieces

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Model:PE21-3052

Main Unit Dimensions: Length 2220mm / Width 1765mm / Height 2200mm

Weight: 3200 KG

Number of Electrodes: 21 Pieces

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Model:PE25A-3052

Main Unit Dimensions: Length 2894mm / Width 1892mm / Height 2892mm

Weight: 3500 KG

Number of Electrodes: 25 Pieces

Scope of application
  • Modification of PTFE Materials for High-Frequency PCBs to Improve Hydrophilicity and Reduce Hole Voids
  • Removal of Hole Residue in High-Tg, High-Aspect-Ratio, and High-Multilayer PCBs to Enhance the Reliability of Inner-Layer Connections
  • Removal of Residual Film from Dry Film and Ink on Ultra-Fine Circuits of Substrates After Development to Improve Qualification Rate
  • Removal of Carbon Residue by Laser Drilling to Enhance the Reliability of Hole Connections
  • Removal of Hole Residue in Rigid-Flex PCBs to Improve the Etching Consistency of Rigid and Flexible Materials and Enhance Hole Wall Quality
  • Roughening of Flexible Materials for Rigid-Flex PCBs Before Lamination to Improve Lamination Bonding Strength
  • Pretreatment of Precious Metals to Remove Surface Oil and Grease and Improve Qualification Rate
  • Removal of Surface Oxidation and Activation of BGA and Gold Fingers to Enhance Metal Sputtering/Solderability
Advantage
Etching Rate
0.04-0.08mg/min
Etching Rate
High Aspect Ratio: TP Value
50%-75%
High Aspect Ratio: TP Value
Uniformity of glue removal/Temperature uniformity
Resist Stripping Uniformity: 80%-85%
Temperature Uniformity: 85%-90%
Uniformity of glue removal/Temperature uniformity
Main features
  • The chamber is made of aviation-grade aluminum alloy with seamless welding, and the vacuum leakage rate is less than 10 mt/min, which better ensures the etching rate and uniformity.

  • The electrode adopts an integrated forming process (seamless welding) and a unique air inlet and exhaust method, resulting in better ionization effect.

  • The electrode heating efficiency is increased by 20%, and the etching uniformity is excellent.

  • Meanwhile, an optional electrode constant temperature system is available, which can reduce the heating time by 50%.
    The etching rate is 15-20% faster than that of imported brands and 35-40% faster than that of other domestic brands.