Ultra Clean
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Model:Ultra Clean

Use materials with extremely low molecular weight and no contamination risk to the process as additives (e.g., silicon).

Scope of application
  • For equipment with demanding process requirements, such as the standard configurations of the Novellus Concept II Speed and LAM 2300 systems.
Advantage
No solid byproducts generated
No solid byproducts generated
No solid byproducts generated